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Application of EBSD analysis to non-ferrous metal materials

The EBSD analysis of non-ferrous metals enables the analysis of various metals by optimizing the pretreatment methods using our proprietary technology.

By optimizing the preprocessing methods for EBSD analysis of non-ferrous metals, it enables the EBSD analysis of various metals. This applies not only to single materials but also to the observation and analysis of heterogeneous multilayers (especially heterogeneous boundary layers). Applicable materials include copper, solder (such as Sn-Ag and Sn-Pb systems), aluminum, and titanium.

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[Example of analysis using EBSD] Chip

I will introduce an example of analysis using EBSD where orientation was observed in the Al wiring.

We will introduce an example of analysis of the chip surface wiring (Al) using EBSD. The package resin was opened using a chemical solution/RIE, and an analysis of the Al pattern on the chip surface was conducted using EBSD. As a result, orientation was observed in the Al wiring. The normal orientation is distributed, and it is believed that many crystals are present. 【Overview】 ■ Analysis Method - The package resin was opened using a chemical solution/RIE. - An analysis of the Al pattern on the chip surface was conducted using EBSD. ■ Results - Orientation was observed in the Al wiring. *For more details, please refer to the PDF document or feel free to contact us.

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  • Analytical Equipment and Devices
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Example of analysis using EBSD: Via

The EBSD method allows for the estimation of crystal size distribution and residual stress.

We will introduce an example of analysis using EBSD for vias (Cu) formed in a multilayer substrate. With the EBSD method, it is possible to infer the distribution of crystal sizes and residual stress. Additionally, by highlighting on the map, the features that appear in the graph can be visualized. 【Overview】 ■Observation of crystal structure using EBSD ・IPF map ・GROD map ・Crystal grain distribution map *For more details, please refer to the PDF document or feel free to contact us.

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  • Analytical Equipment and Devices
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Example of analysis using EBSD (ceramics)

Examples of analysis using EBSD, such as 'Observation/Elemental Analysis' and 'Analysis by EBSD'!

This is an example of analysis using EBSD for ceramics (Al2O3). In the "Observation/Elemental Analysis," it was determined to be Al2O3 based on elemental analysis using EDX, and it was observed that Si was scattered as shown in the map. In the "Analysis using EBSD," the distribution of crystal size and orientation can be confirmed using the EBSD method, and by highlighting the map, the features that appeared in the graph can be visualized. [Analysis Overview] ■ Observation/Elemental Analysis - Observation using SEM and elemental analysis using EDX ■ Analysis using EBSD - Observation of crystal structure using EBSD *For more details, please refer to the PDF document or feel free to contact us.

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[Data] Whisker Analysis by EBSD

Introducing a case study analyzing whiskers that occurred on the lead terminals of an IC package!

This document introduces a case study on whiskers that occurred on the lead terminals of IC packages, where cross-sections were created through mechanical polishing, followed by SEM observation and EBSD analysis. It includes surface SEM images of the IC package as well as cross-sectional SEM images. It is evident that the crystal grains and grain boundaries measured by the EBSD method are consistent. We encourage you to read it. 【Published Cases】 ■Observation/Cross-section Preparation ■Analysis by EBSD *For more details, please refer to the PDF document or feel free to contact us.

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